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Alicat Scientific MS | Corrosion-Resistant Mass Flow Meter | 0.5 SCCM-12,000 SLPM, 130 gases
The Alicat Scientific MS uses corrosion-resistant wetted materials to measure corrosive and non-corrosive gases across 0.5 SCCM to 12,000 SLPM full scale, at 11.5 to 160 PSIA. It is specified at ±0.4% of reading and ±0.2% of full scale, with 130 gas calibrations including corrosives. It suits chemical, semiconductor and research work with reactive gases. For integration, the MS offers process connections of 10-32, NPT, SAE, BSPP, VCRM, VCO, compression.
Key features
- 130 preloaded gases incl. corrosives
- Corrosion-resistant wetted path
- 10,000:1 turndown
- Laminar DP measurement with temperature and pressure correction
- Range codes MS-0.5SCCM to MS-10000SLPM listed
- Process connections: 10-32, NPT, SAE, BSPP, VCRM, VCO, compression
- Specifications
- Downloads
| Part Number | MS |
| Brand | Alicat Scientific |
| Full-scale range | 0.5 SCCM - 12,000 SLPM |
| Operating pressure | 11.5 - 160 PSIA |
| Accuracy | ±0.4% of reading and ±0.2% FS |
| Gas calibrations | 130 incl. corrosives |
| Turndown | 10,000:1 |
| Communications | RS-232 (default), RS-485, analog, Modbus RTU/TCP, EtherNet/IP, EtherCAT, PROFINET, PROFIBUS, DeviceNet, IO-Link |
| Process connections | 10-32, NPT, SAE, BSPP, VCRM, VCO, compression |
| Ingress protection | IP40 (default); IP66, IP67 optional |
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