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Mitutoyo 378-186-1 | FS70L Microscope Unit for Semiconductor Inspection | 50 mm focus travel
Part Number : 378-186-1
The 378-186-1 is the FS70L variant of the FS70 range of Mitutoyo's microscope units for semiconductor inspection, offering 50 mm of focus travel and a C-mount camera interface (via optional adapter B).
Key features
- Short-base model designation: FS70L-S
- Focus: concentric coarse and fine wheels; 0.1 mm/rev. fine and 3.8 mm/rev. coarse
- Reflected bright-field illumination (Koehler, with aperture diaphragm); optional 12 V / 100 W fibre-optic light source, 1.5 m light guide
- Siedentopf-type eyepiece tube, interpupillary distance 51-76 mm
- L models support YAG laser wavelengths of 1064, 532 and 355 nm; DIC is not supported
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